DataVXAdvanced Materials TechnologiesPaper
journal article·2023-01

High‐Performance Nanostructured Flexible Capacitor by Plasma‐Induced Low‐Temperature Atomic Layer Annealing

Jaehyeong Lee, Dohyun Go, Useung Lee, Seunghyeon Lee, Keun Hoi Kim, Jeong Woo Shin, Hyein Kim, Jong G. Ok, Jihwan An

Advanced Materials Technologies· Volume 8· Issue 1
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Source abstract

Abstract

Abstract Fabricating high‐quality thin films on a 3D structured polymer substrate is crucial in realizing high‐performance flexible electronics. Herein, simple yet effective twofold strategies are demonstrated to directly fabricate flexible thin film capacitors on polymer substrate: the crystallization of high‐k TiO2 film by plasma‐assisted atomic layer annealing at low temperature (80 °C) on nanostructured polycarbonate (PC) substrates fabricated by simple dynamic nanoinscribing (DNI) technique. Plasma‐induced amorphous‐to‐anatase phase transformation occurs in PEALD TiO2/ZrO2 bilayer thin films, resulting in the capacitance density increase by 30%. The DNI patterning of PC substrates in two directions further increases the surface area by 35% and the capacitance density by 37%, leading to the flexible capacitor of a record‐high capacitance density (24.2 nF mm−2) with mechanical stability.
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Research context

PolymersNanomaterialsMaterials processing

OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Semiconductor materials and devices · Ferroelectric and Piezoelectric Materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Manufacturing Systems and Design Engineering Seoul National University of Science and Technology (SeoulTech) Gongneung‐ro 232, Nowon‐gu Seoul 01811 Republic of Korea

Department of Nano‐Bio Engineering Seoul National University of Science and Technology (SeoulTech) Gongneung‐ro 232, Nowon‐gu Seoul 01811 Republic of Korea

Department of Mechanical and Automotive Engineering Seoul National University of Science and Technology (SeoulTech) Gongneung‐ro 232, Nowon‐gu Seoul 01811 Republic of Korea

Department of New Energy Engineering Seoul National University of Science and Technology (SeoulTech) Gongneung‐ro 232, Nowon‐gu Seoul 01811 Republic of Korea

Funding

Ministry of Trade, Industry and Energy · National Research Foundation of Korea

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