Growth and Micro-Raman study of RF magnetron sputter deposited PbTiO₃thin films

Abstract PbTiO3 thin films have been prepared on Si ⟨100⟩ and MgO ⟨100⟩ substrates using sequential RF magnetron sputtering of Pb and Ti targets. As deposited films were post annealed in the presence of oxygen to get PbTiO3 phase. Films were characterized using Xrd, SEM, XPS and temperature dependent Micro-Raman studies. Micro-Raman spectra were obtained from 75K to 550K. We have investigated the low temperature phase transitions and noticed that there is a possible evidence for the structural phase transitions in our low temperature Raman data of the polycrystalline PT films.