Electrical Properties of CSD-Derived Pb(Zr,Ti)O₃Thin Films with Different Orientations and Compositions

(001)-/(100)-and (111)-preferred Pb(Zr, Ti)O 3 (PZT) films with different compositions were successfully deposited on Pt/Ti/SiO 2 /Si substrates through chemical solution deposition (CSD). The dielectric constants, polarization and piezoelectric properties (d 33 ) for (001)-/(100)-and (111)-preferred PZT films depended on the compositions of the films and exhibited highest values near the morphotropic phase boundary (MPB) composition. On the other hand, the polarization of (001)-/(100)-preferred PZT films exhibited smaller values in comparison with that of (111)-preferred PZT films regardless of the compositions. The electrical properties of the PZT films were significantly affected by the orientations and the compositions of the films. Keywords: PZT filmorientationcompositionelectrical properties Acknowledgments Paper originally presented at IMF-11, Iguassu Falls, Brazil, September 5–9, 2005