Facilitating Dielectric Elastomer Actuator Multilayer Fabrication and Performance Through Low‐Contact‐Resistance Hybrid Electrodes, Scalable Vacuum Filtration, and Adaptive Pre‐Clearing

Abstract Networks of conductive nanoparticles have been used as electrodes for dielectric elastomer actuator multilayers because of their excellent extensibility and low added stiffness. Nanoparticle network topography, however, has typically effected a tradeoff between conductivity and breakdown strength. This has limited actuators to a corresponding tradeoff between either high operating frequencies and efficiencies or high stresses, strains, and energy densities. This tradeoff is resolved by spatially patterning multiple nanoparticles to produce hybrid electrodes. Sparse networks of high‐aspect‐ratio carbon nanotubes allow for self‐clearing in the body of the electrode, yielding 54.7 V µm ⁻¹ breakdown strength, 86.4% that of the neat elastomer. Dense networks of low‐aspect‐ratio carbon black at the external interfaces, meanwhile, provide low contact resistance (44.09 kΩmm). Two tools essential for their practical deployment are developed: a scalable fabrication process and an automated pre‐clearing algorithm. The fabrication method leverages the batch spray and stamp paradigm in concert with vacuum filtration to scalably deposit nanoparticle electrodes with minimal parameter tuning, enabling the production of a 100‐layer actuator capable of 14% strain. The adaptive pre‐clearing algorithm discriminates between and responds to a range of defect‐induced failures in newly fabricated actuators, eliminating the need for human oversight and standardizing the break‐in procedure.