High‐Resolution Scanning Probe Nanolithography of 2D Materials: Novel Nanostructures

Abstract 2D materials have attracted tremendous research interest since the isolation of graphene. Their remarkable optical, electronic, and mechanical properties show that they hold great potential across a range of technological applications. As a result, there is a growing demand for low‐cost, low‐energy, and high‐resolution lithography methods that will enable the integration of 2D materials into complex integrated circuitry, biomedical devices, and in the generation of quantum‐confined nanostructures. Recent advances in scanning probe nanolithography (SPL) techniques for the lithography of 2D materials such as graphene, black phosphorus, molybdenum disulfide, and tungsten diselenide are discussed, including the various physiochemical aspects of subtractive and additive lithography of these materials. Examples of 2D‐material‐based devices fabricated by SPL and their properties are also described. The comparative advantages of the individual SPL techniques are discussed along with the future outlook of SPL for 2D materials.