journal article·2026-07Open access

Atomic Layer Deposition of Metallic Molybdenum Dioxide Thin Films Enabling High‐ k Rutile Capacitors (Adv. Mater. Interfaces 14/2026)

Alexey Ganzhinov, Miika Mattinen, Marko Vehkamäki, Kenichiro Mizohata, Mykhailo Chundak, Georgi Popov, Paavo Porri, Mikko Ritala, Matti Putkonen

Advanced Materials Interfaces· Volume 13· Issue 14

Abstract

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Research context

OpenAlex topics: Semiconductor materials and devices · Transition Metal Oxide Nanomaterials · Electronic and Structural Properties of Oxides

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Affiliations

Department of Chemistry University of Helsinki Helsinki Finland

Department of Physics University of Helsinki Helsinki Finland

ASM Microchemistry Oy Helsinki Finland

References

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