Geometrical Anatomy for Oxygen Vacancies in Epitaxial Hf0.5Zr0.5O2 Films Grown via Atomic Layer Deposition
Source abstract
Abstract
Abstract The selective influence of elastic strain on the formation of oxygen deficiencies in (001)‐, (110)‐, and (111)‐ epitaxial Hf0.5Zr0.5O2 films grown by using atomic layer deposition is reported. Optical spectroscopy, conducted using UV–vis spectroscopic ellipsometry on these Hf0.5Zr0.5O2 films grown on yttria‐stabilized zirconia substrates, revealed a dominant shallow trap level in the (111)‐oriented Hf0.5Zr0.5O2 film. X‐ray photoemission spectroscopy demonstrated that the strong oxygen deficiency is preferred in the (111)‐oriented Hf0.5Zr0.5O2 film. Density functional theory calculations of oxygen vacancy formation energy also showed a pronounced preference for oxygen deficiencies in the (111) orientation. This selective formation of oxygen vacancies in the (111)‐oriented Hf0.5Zr0.5O2 film suggests that the latent phenomena associated with oxygen defects in functional Hf0.5Zr0.5O2 films are partly attributed to the directional strain in the (111) orientation.
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Research context
OpenAlex topics: Ferroelectric and Negative Capacitance Devices · Semiconductor materials and devices · Electronic and Structural Properties of Oxides
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Physics Education Seoul National University Seoul 08826 Republic of Korea
Department of Physics Ulsan National Institute of Science and Technology Ulsan 44919 Republic of Korea
Department of Energy Engineering School of Energy and Chemical Engineering Ulsan National Institute of Science and Technology Ulsan 44919 Republic of Korea
Graduate School of Semiconductor Materials and Devices Engineering Ulsan National Institute of Science and Technology (UNIST) Ulsan 44919 Republic of Korea
Center for Educational Research Seoul National University Seoul 08826 Republic of Korea
Funding
National Research Foundation of Korea · Ministry of Science and ICT, South Korea · National Supercomputing Center, Korea Institute of Science and Technology Information · Korea Institute for Advancement of Technology · Ministry of Trade, Industry and Energy
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