Source abstract
Abstract
Abstract In this paper, the formation of laser‐induced periodic surface structures (LIPSS) on atomic‐layer deposited MoS2 layers are studied experimentally. The process parameters (laser fluence and the pulse overlap) corresponding to formation of low‐ and high‐spatial frequency LIPSS as well as ablation and modification of the layers are identified for different pulse durations in the range from 0.2 to 10 ps. The role of the temperature accumulation is evaluated by changing the repetition rate from 0.2 to 2 MHz. The negative accumulation effect, i.e., the ablation of the layers becomes more difficult at higher laser pulse overlaps, is also observed. A simple model explaining the transition between different types of the LIPSS and the decrease of the ablation efficiency with the pulse overlap is suggested.
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Research context
OpenAlex topics: Laser Material Processing Techniques · Diamond and Carbon-based Materials Research · Force Microscopy Techniques and Applications
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Affiliations
Ruhr‐Universität Bochum Applied Laser Technologies Universitätsstraße 150 44801 Bochum Germany
Ruhr‐Universität Bochum Microsystems Technology Universitätsstraße 150 44801 Bochum Germany
Ruhr‐Universität Bochum Center for Interface Dominated Materials Universitätsstraße 150 44801 Bochum Germany
University of Applied Sciences Münster Laser Center (LFM) Stegerwaldstraße 39 48565 Steinfurt Germany
Center for Lasers and Optics Anhui University Hefei 230088 China
Funding
Deutsche Forschungsgemeinschaft · Bundesministerium für Bildung und Forschung
References (33)
Show source-provided references
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10.1063/1.4902950 ↗18. Kasischke M. · Evgeny L. Gurevich · 2018 · 445 · 197
33. Müller K. · Phys. Status Solidi A · 2024 · 221 · 15