Impact of Silicon Ion Irradiation on Aluminum Nitride‐Transduced Microelectromechanical Resonators (Adv. Mater. Interfaces 32/2023)
Source abstract
Abstract
Microelectromechanical Systems In article 2300240, Lynes, Chandrahalim, and co-workers demonstrate the impact of heavy charged particle radiation on piezoelectric microelectromechanical resonators within the natural space environment. Heavy ion irradiation imparts energy to materials through both non-ionizing energy loss and ionization. Non-ionizing energy loss involves the transfer of momentum from the irradiated particle to the atomic nuclei of the materials, thereby leading to atomic displacements within these materials.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Acoustic Wave Resonator Technologies · Advanced MEMS and NEMS Technologies · GaN-based semiconductor devices and materials
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Affiliations
Department of Electrical and Computer Engineering Air Force Institute of Technology Wright‐Patterson Air Force Base OH 45433 USA
Ion Beam Laboratory Sandia National Laboratories Albuquerque NM 87123 USA
Department of Nuclear Engineering The University of New Mexico Albuquerque NM 87131 USA
References
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