Influence of a Tailored Oxide Interface on the Quality Factor of Microelectromechanical Resonators (Adv. Mater. Interfaces 9/2023)
Source abstract
Abstract
Microelectromechanical Resonators The cover art illustrates an aluminum nitride transduced microelectromechanical resonators, as described by David D. Lynes and Hengky Chandrahalim in article number 2202446. By including a tailored oxide thin film in the resonator's body, the quality factor is increased by up to 400% for devices operating at very high frequency and super high frequency bands. The quality factor enhancement persists at operating temperatures as low as −200 °C up to +200 °C.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Acoustic Wave Resonator Technologies
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Affiliations
Department of Electrical and Computer Engineering Air Force Institute of Technology Wright‐Patterson Air Force Base Dayton OH 45433 USA
References
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