Nanolithography: Manufacturing Over Many Scales: High Fidelity Macroscale Coverage of Nanoporous Metal Arrays via Lift‐off‐Free Nanofabrication (Adv. Mater. Interfaces 7/2014)
Source abstract
Abstract
Macroscale patterning of nanometer-scale features by single-step nanolithography can embody a concept of “manufacturing over many length scales.” A simple blend between block copolymer nanolithography and collimated ion beam milling creates homogeneous nanoporous arrays of metal over a ten-centimeter wafer scale, for which sub-nanometer-level smoothness of the metal film is critical as revealed by T. Bond, H. G. Park, and co-workers in article 1400084.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Block Copolymer Self-Assembly · Nanoporous metals and alloys · Anodic Oxide Films and Nanostructures
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Affiliations
Nanoscience for Energy Technology and Sustainability Department of Mechanical and Process Engineering ETH Zurich Zürich CH‐8092 Switzerland
Center of Micro and Nano Technology Materials Engineering Directorate Lawrence Livermore National Laboratory Livermore CA 94550 USA
References
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