journal article·2019-02Open access

Atomic Layer Deposition: 2D Transition Metal Dichalcogenide Thin Films Obtained by Chemical Gas Phase Deposition Techniques (Adv. Mater. Interfaces 3/2019)

Gyu‐Hyeon Park, Kornelius Nielsch, Andy Thomas

Advanced Materials Interfaces· Volume 6· Issue 3

Abstract

Ultrathin 2D transition metal dichalcogenide (TMD) thin films have attracted much attention due to their very good electrical, optical, and electrochemical properties. Here, the recent progress in 2D TMD thin films is reviewed and the current applications of these materials fabricated by chemical vapor deposition and atomic layer deposition are surveyed. More details are in article number 1800688 by Gyu-Hyeon Park, Kornelius Nielsch, and Andy Thomas.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: 2D Materials and Applications · Advanced biosensing and bioanalysis techniques · Chalcogenide Semiconductor Thin Films

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Affiliations

Leibniz Institute for Solid State and Materials Research (IFW) Dresden 01069 Dresden Germany

Institute of Materials Science Technische Universität Dresden 01062 Dresden Germany

References

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