Hot Wire ALD: Hot‐Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry (Adv. Mater. Interfaces 18/2017)
Source abstract
Abstract
The cover depicts a reactor utilized for hot-wire assisted atomic layer deposition (Hot Wire ALD), enabling formation of reactive species (radicals) at low substrate temperatures, without the use of plasma. A tungsten filament heated up to1300–2000 °C is installed on the side. The reactor is equipped with an in situ spectroscopic ellipsometer, as reported by Alexey Y. Kovalgin and co-workers in article number 1700058.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Catalytic Processes in Materials Science
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Affiliations
MESA+ Institute for Nanotechnology University of Twente P. O. Box 217 7500 AE Enschede The Netherlands
Toyota Motor Europe/Advanced Techonolgy Division Hoge Wei 33 Zaventem 1930 Belgium
References
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