High‐Throughput Generation of Hierarchical Micro/Nanostructures by Spatial Vibration‐Assisted Diamond Cutting

A spatial vibration-assisted diamond cutting (SVDC) technique for one-step processing of hierarchical micro/nanostructures at ambient conditions is proposed. By synthesizing the computer numerical control diamond machining and a 3 degree-of-freedom piezo-actuated nanovibrator, the SVDC mechanical nanomachining system with multiscale capability in both time and spatial domains is constructed. As a service to our authors and readers, this journal provides supporting information supplied by the authors. Such materials are peer reviewed and may be re-organized for online delivery, but are not copy-edited or typeset. Technical support issues arising from supporting information (other than missing files) should be addressed to the authors. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.