3D Imaging and Quantitative Subsurface Dielectric Constant Measurement Using Peak Force Kelvin Probe Force Microscopy
Source abstract
Abstract
Abstract Noninvasive and depth‐sensitive measurements of dielectric properties are becoming of great interest in advanced and complex nanostructured architectures. Here, a straightforward parallel approach applicable in peak force Kelvin probe force microscopy for a 3D measurement of dielectric constants at the nanoscale is demonstrated. The proposed approach features a simultaneous measurement of the mechanical, electrical, and depth‐dependent dielectric properties applied to embedded nanostructures. The findings provide initial elements for further development of experimental dielectric nano‐tomography methods for characterizing buried and embedded systems and dielectric interfaces.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis · Near-Field Optical Microscopy
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Laboratoire National de Métrologie et d'Essais (LNE) Trappes 78197 France
Laboratory of Physics and Modeling, EDST Lebanese University Tripoli 1300 Lebanon
Bruker Nano Surfaces Santa Barbara CA 93117 USA
College of Engineering and Technology American University of the Middle East Kuwait
Laboratory of Physics of Condensed Matter LPMC Université de Picardie Jules Verne Amiens 80093 France
Funding
European Metrology Programme for Innovation and Research
References (67)
Show source-provided references
1. 10.1088/1361-648X/aa5b4a10.1088/1361-648X/aa5b4a ↗
2. 10.1021/acsnano.5b0427910.1021/acsnano.5b04279 ↗
3. 10.1021/acsnano.9b0480810.1021/acsnano.9b04808 ↗
4. 10.1021/acs.accounts.5b0004610.1021/acs.accounts.5b00046 ↗
5. 10.1021/acsnano.5b0581010.1021/acsnano.5b05810 ↗
6. 10.1021/acsnano.8b0721610.1021/acsnano.8b07216 ↗
7. 10.1021/jz301622a10.1021/jz301622a ↗
8. 10.1021/nn102727810.1021/nn1027278 ↗
9. 10.1088/0957-4484/24/13/13570610.1088/0957-4484/24/13/135706 ↗
10. 10.1021/acsnano.5b0689310.1021/acsnano.5b06893 ↗
11. 10.1021/nn204210u10.1021/nn204210u ↗
12. 10.1021/nn507019c10.1021/nn507019c ↗
13. 10.1063/1.273492010.1063/1.2734920 ↗
14. 10.1017/S143192762101231910.1017/S1431927621012319 ↗
15. 10.1039/D1NR01058A10.1039/D1NR01058A ↗
16. 10.1021/acsnano.6b0240210.1021/acsnano.6b02402 ↗
17. 10.3762/bjnano.9.27910.3762/bjnano.9.279 ↗
18. 10.1021/acsnano.5b0791910.1021/acsnano.5b07919 ↗
19. 10.1063/5.001904210.1063/5.0019042 ↗
20. 10.1126/science.aat419110.1126/science.aat4191 ↗
21. 10.1039/C6NR09124E10.1039/C6NR09124E ↗
22. 10.1021/acsnano.7b0217010.1021/acsnano.7b02170 ↗
23. 10.1088/0957-4484/26/13/13570110.1088/0957-4484/26/13/135701 ↗
24. 10.1103/PhysRevB.83.12140910.1103/PhysRevB.83.121409 ↗
25. 10.1021/nn501631410.1021/nn5016314 ↗
26. 10.1016/j.ultramic.2011.05.00110.1016/j.ultramic.2011.05.001 ↗
27. 10.1021/jp411951h10.1021/jp411951h ↗
28. 10.1016/j.ultramic.2014.06.00610.1016/j.ultramic.2014.06.006 ↗
29. 10.3390/s1924540510.3390/s19245405 ↗
30. 10.1063/5.000462810.1063/5.0004628 ↗
31. 10.3390/ma1412328310.3390/ma14123283 ↗
32. 10.1038/nmat336910.1038/nmat3369 ↗
33. 10.3390/nano1111310410.3390/nano11113104 ↗
34. 10.3390/nano1103082010.3390/nano11030820 ↗
35. Antoniou N. · Proc.SPIE · 2021 · 11611
36. 10.1149/MA2019-02/47/215110.1149/MA2019-02/47/2151 ↗
37. 10.1063/1.282111910.1063/1.2821119 ↗
38. 10.1021/nl803851u10.1021/nl803851u ↗
39. 10.1088/0957-4484/23/20/20570310.1088/0957-4484/23/20/205703 ↗
40. 10.1088/0957-4484/17/18/00910.1088/0957-4484/17/18/009 ↗
41. 10.1088/0957-4484/12/4/32110.1088/0957-4484/12/4/321 ↗
42. 10.1007/3-540-27453-7_910.1007/3-540-27453-7_9 ↗
43. 10.1051/epjap/201001010.1051/epjap/2010010 ↗
44. 10.3762/bjnano.9.27910.3762/bjnano.9.279 ↗
45. 10.1063/1.494495310.1063/1.4944953 ↗
46. B.Pittenger N.Erina C.Su Quantitative Mechanical Property Mapping at the Nanoscale with PeakForce QNM 2010.
47. 10.1088/0957-4484/22/7/07550110.1088/0957-4484/22/7/075501 ↗
48. 10.1016/S0167-5729(02)00077-810.1016/S0167-5729(02)00077-8 ↗
49. 10.1063/5.003833510.1063/5.0038335 ↗
50. K.Kaja Ph.D Thesis Université Joseph Fourier – Grenoble I2010.
51. 10.1021/nl200581g10.1021/nl200581g ↗
52. Magonov S. · 2009
53. 10.1116/1.307967510.1116/1.3079675 ↗
54. 10.1088/0957-4484/14/2/34510.1088/0957-4484/14/2/345 ↗
55. Wagner T. · 2016
56. P.Inc Test Sample SMiM n.d https://www.primenanoinc.com/buried‐sio2‐structures‐under‐si3n4‐film.html.
57. 10.1063/1.295706910.1063/1.2957069 ↗
58. 10.1063/1.512298410.1063/1.5122984 ↗
59. 10.1088/0957-4484/20/39/39570210.1088/0957-4484/20/39/395702 ↗
60. 10.1063/1.325122510.1063/1.3251225 ↗
61. 10.1063/1.242452410.1063/1.2424524 ↗
62. 10.1016/S0167-739X(97)00017-410.1016/S0167-739X(97)00017-4 ↗
63. 10.1016/j.eswa.2008.01.03910.1016/j.eswa.2008.01.039 ↗
64. 10.1063/5.006918810.1063/5.0069188 ↗
65. 10.1016/j.ceramint.2008.09.01010.1016/j.ceramint.2008.09.010 ↗
66. 10.1088/0957-4484/25/25/25570210.1088/0957-4484/25/25/255702 ↗
67. 10.2478/s11534-011-0096-210.2478/s11534-011-0096-2 ↗