Perylenes, Porphyrins, and Other Large Dye Molecules for Molecular Layer Deposition

Abstract Molecular layer deposition (MLD) is an incredibly powerful and flexible tool for designing completely new materials with novel and unique properties. The low temperature layer‐by‐layer approach and the use of highly reactive reactants allows one to combine vastly different organic and inorganic species and construct nanostructures with subnanometer precision. If not limited by the volatility of the reactants involved, the possibilities will be endless. This is most notable for the organic building blocks where an overall low volatility severely limits the toolbox of large molecules with interesting optical and electrical properties such as red‐ox activity and optical conversion. In this work, different strategies for molecular design of large molecules are investigated that allow vaporization while still having the necessary reactivity for MLD growth. Using these strategies, film growth with perylene and porphyrin derivatives, both molecules well known for their functional and optical properties are successfully achieved. With this knowledge, there is an opening to include much larger and more complex organic molecules into the world of vapor phase chemistry.