Fabricating Mass‐Producible High‐Performance Metaholograms Using Sol‐Gel‐Processed TiO₂

Abstract A metahologram is a nanostructured optical device designed to manipulate light at subwavelength scales, allowing the creation of highly efficient and precise holographic images. Because metaholograms are fabricated using electron‐beam lithography, their mass production is inherently constrained by the low writing speed and high costs of the process. In this study, nanoimprint lithography (NIL) is used to transfer metahologram patterns onto 6‐in. substrates with high fidelity. Large‐scale metaholograms are fabricated using TiO₂ synthesized through the sol‐gel method, which provides a high refractive index, chemical stability, and cost‐effectiveness for mass production. Through calcination, enhanced optical performance owing to the crystallization of TiO₂ is enhanced. The findings demonstrate that TiO₂‐based metasurfaces can be fabricated efficiently using NIL, allowing the scalable production of high‐efficiency optical devices.