The Structural Modulation of Amorphous 2D Tungsten Oxide Materials in Magnetron Sputtering

Abstract 2D oxide materials have gained tremendous attention in the applications. Herein, a synthesis route of 2D WO₃ materials via magnetron sputtering is reported. A deposition between 2D monolayers and thin film structure are accomplished according to the temperature of substrate. And 2D monolayers are only formed on a cooled substrate. Ag doping helps to exfoliate 2D WO₃ into freestanding monolayers, in which the thickness of 2D monolayer is only ≈3 nm. The ultralarge size of 2D WO₃ shows unique features from the traditional 2D material. Resistive switching device and photocatalysis are discussed as examples of application. There is a clear intermediate resistance state in the device with 2D structure. And the failure of resistive switching device is closely related with the 2D structure of WO₃. In the application of photocatalysis, an improved two‐step exfoliation, achieving a stack of WO₃ monolayers with a large internal volume, is utilized. The enhancements of photocatalysis are obtained with 2D WO₃ after exfoliation.