Laser‐Fabricated 2D Molybdenum Disulfide Electronic Sensor Arrays for Rapid, Low‐Cost, Ultrasensitive Detection of Influenza A and SARS‐Cov‐2

Abstract Multiplex electronic antigen sensors for detection of SARS‐Cov‐2 spike glycoproteins and hemagglutinin from influenza A are fabricated using scalable processes for straightforward transition to economical mass‐production. The sensors utilize the sensitivity and surface chemistry of a 2D MoS₂ transducer for attachment of antibody fragments in a conformation favorable for antigen binding with no need for additional linker molecules. To make the devices, ultra‐thin layers (3 nm) of amorphous MoS₂ are sputtered over pre‐patterned metal electrical contacts on a glass chip at room temperature. The amorphous MoS₂ is then laser annealed to create an array of semiconducting 2H‐MoS₂ transducer regions between metal contacts. The semiconducting crystalline MoS₂ region is functionalized with monoclonal antibody fragments complementary to either SARS‐CoV‐2 S1 spike protein or influenza A hemagglutinin. Quartz crystal microbalance experiments indicate strong binding and maintenance of antigen avidity for antibody fragments bound to MoS₂. Electrical resistance measurements of sensors exposed to antigen concentrations ranging from 2–20 000 pg mL⁻¹ reveal selective responses. Sensor architecture is adjusted to produce an array of sensors on a single chip suited for detection of analyte concentrations spanning six orders of magnitude from pg mL⁻¹ to µg mL⁻¹.