In Situ Electrical Properties’ Investigation and Nanofabrication of Ag/Sb₂Te₃ Assembled Multilayers’ Film

Abstract Nanopatterned fabrication and electrical properties of Ag/Sb₂Te₃ layer‐by‐layer assembled films are systematically investigated by a conductive atomic force microscope. Multilayers’ film composed by alternating Ag and Sb₂Te₃ with respective thicknesses of 5 and 10 nm shows a bipolar resistive switching behavior contributed by the silver conductive filaments. Designed cross‐plane nanofilament arrays with reconfigurable patterns are fabricated, which show a potential application in memristor and nanofabrication. Multilayers with the same thickness of Ag but increased thickness of Sb₂Te₃ (up to 20 nm) present a Fowler–Nordheim tunneling‐dominated current and show in‐plane snowflake silver dendrite on the surface. Further studies on the silver dendrite may bring potential applications in extensive fields such as multifunctional data storage and neuromorphic. By controlling the type (Sb₂Te₃, Bi₂Te₃, etc.) and thickness of solid electrolyte materials, electronic devices with specific functions and applications can be designed.