journal article·2007-11-05

Inside Front Cover: Direct Patterning, Conformal Coating, and Erbium Doping of Luminescent nc‐Si/SiO2 Thin Films from Solution Processable Hydrogen Silsesquioxane (Adv. Mater. 21/2007)

C. M. Hessel, M. A. Summers, A. Meldrum, M. Malac, J. G. C. Veinot

Advanced Materials· Volume 19· Issue 21
Publisher page

Abstract

Abstract Patterned nanostructure arrays of luminescent, oxide‐embedded silicon nanocrystals (nc‐Si) are formed by reductively thermally processing e‐beam patterns of hydrogen silsesquioxane (HSQ). While traditionally employed as a negative type e‐beam resist, HSQ is shown to produce thin films, non‐flat conformal coatings, and sub‐10 nm structures that contain luminescent nc‐Si. The variety of morphologies (structures) that can be produced by this method highlights the versatility of HSQ as a nc‐Si precursor, report Jonathan Veinot and co‐workers from the University of Alberta, Canada on p. 3513.
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Research context

OpenAlex topics: Silicone and Siloxane Chemistry · Advanced ceramic materials synthesis · Advanced Surface Polishing Techniques

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References

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