Plasma processing of surfaces
Source abstract
Abstract
Plasma techniques are employed in microlithography and in other surface modification methods. The increasing need for sources of “clean” plasma, uncontaminated with metal, has led to the development of new technology which outperforms the traditional Kaufman‐type source. The techniques are compared and some of the possible applications examined.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Copper Interconnects and Reliability · Plasma Diagnostics and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (19)
Show source-provided references
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