Multiscanning method for fabricating electron moiré grating
Source abstract
Abstract
In this paper we present a multiscanning method for fabricating an electron moire grating. Many repeated scans are used, instead of a single scan. The resultant grating lines are the sum of these scans. Through this process, the grating error can be reduced from about 85% in the single-scanning method to below 5%. The experimental results show that a highly accurate grating can be fabricated in this way.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Optical Coatings and Gratings · Advancements in Photolithography Techniques
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References (12)
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