journal article·1999-02

Micellar Inorganic–Polymer Hybrid Systems—A Tool for Nanolithography

Joachim P. Spatz, Thomas Herzog, Stefan Mößmer, Paul Ziemann, Martin Möller

Advanced Materials· Volume 11· Issue 2
Publisher page

Abstract

A approach to nanolithography based on the self-assembly and formation of mono-micellar films of a diblock-copolymer is reported. The Figure shows the formation of islands using an inorganically modified micellar mask. Au3+ in the micelles leads to islands while the formation of a Au-nanoparticle in each single micelle results in holes, owing to an inversion of the etching rate.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Synthesis and properties of polymers · Silicone and Siloxane Chemistry · Nanofabrication and Lithography Techniques

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References

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