Nanoscale Writing of Transparent Conducting Oxide Features with a Focused Ion Beam
Source abstract
Abstract
Embedded, optically transparent, electrically conducting oxide nanowires, and other patterns are written on highly resistive transparent metal oxide thin films with nanoscale spatial control using focused ion beam implantation. The resulting transparent conducting oxide features are 110-160 nm wide, 7 nm deep, and are theoretically limitless in length, connectivity, and shape.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Ion-surface interactions and analysis · Thin-Film Transistor Technologies · ZnO doping and properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (30)
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