Siloxane-Based Hybrid Glass Materials for Binary and Grayscale Mask Photoimaging

Hybrid (organic–inorganic) glass materials, synthesized by the hybrid sol-gel method, are demonstrated to have potential for fabrication of micro-optical and opto-mechanical structures by UV patterning in a single step. The Figure, an SEM image, shows a micro-lens array photolithographically patterned in hybrid glass material using a grayscale photomask.