High-Resolution and Low-Voltage SEM Imaging and Chemical Microanalysis

Simple direct surface imaging of bulk samples at a resolution of 0.5 nm or better is possible in the scanning electron microscope (SEM) described here, which integrates a high-brightness field emission gun and a high-resolution condenser-objective immersion lens. The Figure shows high-resolution surface details of a carbon fiber, which could only be visualized accurately at very low voltages (<1 kV).