Evidence of Large Voids in Pure‐Silica‐Zeolite Low‐k Dielectrics Synthesized by Spin‐on of Nanoparticle Suspensions

Spin-on pure-silica-zeolite or Silicalite films are currently considered as outstanding low-k materials because of their stiffness and ultralow dielectric constant. It is shown that spin-on Silicalite films with low k values unavoidably contain cavities tens of nanometers wide, representing a considerable challenge in their application as on-chip interconnects.