journal article·2024-04Open access

Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems

Ziying Hu, Jie Zhao, Hexia Guo, Rui Li, Mingzheng Wu, Jiahong Shen, Yue Wang, Zheng Qiao, Yue Xu, Greg Haugstad, Dongqi An, Zhaoqian Xie, Irawati Kandela, Khizar R. Nandoliya, Yu Chen, Yi Yu, Qunyao Yuan, Junyu Hou, Yujun Deng, Abdulaziz H. AlDubayan, Quansan Yang, Liangsong Zeng, Di Lu, Jahyun Koo, Wubin Bai, Enming Song, Shenglian Yao, Chris Wolverton, Yonggang Huang, John A. Rogers

Advanced Materials· Volume 36· Issue 15

Abstract

Abstract Bio/ecoresorbable electronic systems create unique opportunities in implantable medical devices that serve a need over a finite time period and then disappear naturally to eliminate the need for extraction surgeries. A critical challenge in the development of this type of technology is in materials that can serve as thin, stable barriers to surrounding ground water or biofluids, yet ultimately dissolve completely to benign end products. This paper describes a class of inorganic material (silicon oxynitride, SiON) that can be formed in thin films by plasma‐enhanced chemical vapor deposition for this purpose. In vitro studies suggest that SiON and its dissolution products are biocompatible, indicating the potential for its use in implantable devices. A facile process to fabricate flexible, wafer‐scale multilayer films bypasses limitations associated with the mechanical fragility of inorganic thin films. Systematic computational, analytical, and experimental studies highlight the essential materials aspects. Demonstrations in wireless light‐emitting diodes both in vitro and in vivo illustrate the practical use of these materials strategies. The ability to select degradation rates and water permeability through fine tuning of chemical compositions and thicknesses provides the opportunity to obtain a range of functional lifetimes to meet different application requirements.
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Research context

OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Conducting polymers and applications · Neuroscience and Neural Engineering

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Querrey‐Simpson Institute for Bioelectronics Northwestern University Evanston IL 60208 USA

State Key Laboratory of Molecular Engineering of Polymers Department of Materials Science Fudan University Shanghai 200433 China

Department of Materials Science and Engineering Northwestern University Evanston IL 60208 USA

State Key Laboratory of Structural Analysis Optimization and CAE Software for Industrial Equipment Department of Engineering Mechanics and International Research Center for Computational Mechanics Dalian University of Technology Dalian 116024 P. R. China

Department of Biomedical Engineering Northwestern University Evanston IL 60208 USA

Characterization Facility University of Minnesota 100 Union St. SE Minneapolis MN 55455 USA

Center for Developmental Therapeutics Northwestern University Evanston IL 60208 USA

Chemistry Life Processes Institute Northwestern University Evanston IL 60208 USA

Department of Neurological Surgery Northwestern University Feinberg School of Medicine Chicago IL 60611 USA

School of Physical Science and Technology Shanghai Tech University Shanghai 201210 China

State Key Laboratory of Mechanical System and Vibration Shanghai Jiao Tong University Shanghai 200240 China

Department of Mechanical Engineering Northwestern University Evanston IL 60208 USA

Institute of Optoelectronics Fudan University Shanghai 200433 P. R. China

Department of Chemistry Department of Neurological Surgery and Department of Electrical Engineering and Computer Science Northwestern University Evanston IL 60208 USA

Funding

National Science Foundation · International Cooperation Project of Ningbo City · Liaoning Revitalization Talents Program · National Natural Science Foundation of China · Science and Technology Commission of Shanghai Municipality

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