An “omega” energy filtering TEM— Principles and applications

An energy filtering transmission electron microscope (EFTEM) has the advantage that, unlike a conventional TEM, it can also utilize the spectroscopic information carried by inelastically scattered electrons, thus making optimum use of all the available information. The design of an EFTEM featuring an Ω‐type imaging electron‐energy‐loss spectrometer that is integrated into the imaging beam path is described, and its modes of use and possible applications discussed.