NanoRobotic Structures with Embedded Actuation via Ion Induced Folding

Abstract 4D structures are tridimensional structures with time‐varying abilities that provide high versatility, sophisticated designs, and a broad spectrum of actuation and sensing possibilities. The downsizing of these structures below 100 μm opens up exceptional opportunities for many disciplines, including photonics, acoustics, medicine, and nanorobotics. However, it requires a paradigm shift in manufacturing methods, especially for dynamic structures. A novel fabrication method based on ion‐induced folding of planar multilayer structures embedding their actuation is proposed—the planar structures are fabricated in bulk through batch microfabrication techniques. Programmable and accurate bidirectional foldings (−70° − +90°) of Silica/Chromium/Aluminium (SiO₂/Cr/Al) multilayer structures are modeled, experimentally demonstrated then applied to embedded electrothermal actuation of controllable and dynamic 4D nanorobotic structures. The method is used to produce high‐performances case‐study grippers for nanorobotic applications in confined environments. Once folded, a gripping task at the nano‐scale is demonstrated. The proposed fabrication method is suitable for creating small‐scale 4D systems for nanorobotics, medical devices, and tunable metamaterials, where rapid folding and enhanced dynamic control are required.