Silicon micro‐velcro
Source abstract
Abstract
Silicon micromachining technology has been employed to fabricate dense, regular arrays of microstructures which act as mechanical adhesives. Structures such as that shown in the figure have potential applications in the biocompatible bonding of human tissue during surgery, their barb‐like nature preventing retraction. A second approach, using mating structures, provides precision self‐alligning, room‐temperature bonding with potential in the mounting of integrated circuit chips. magnified image
Source: crossref · Quality: baseline
Research context
OpenAlex topics: 3D IC and TSV technologies · Nanofabrication and Lithography Techniques · Advanced MEMS and NEMS Technologies
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References (6)
Show source-provided references
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