Epitaxial Transition Metal Oxide Nanostructures Fabricated by a Combination of AFM Lithography and Molybdenum Lift‐Off
Source abstract
Abstract
A novel process for the microfabrication of metal oxide nanostructures is developed based on combining thin film deposition at high temperatures with the use of a Mo mask fabricated by atomic force microscopy lithography. The Mo mask is lifted-off using H2O2 solution after deposition of the oxide film. The figure shows nanoscale Fe2.5Mn0.5O4 stripes fabricated by this process.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Electronic and Structural Properties of Oxides · Force Microscopy Techniques and Applications · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (38)
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