Micropatterned Porous‐Silicon Bragg Mirrors by Dry‐Removal Soft Lithography
Source abstract
Abstract
Micropatterned porous-Si Bragg mirrors (see figure) are created by dry-removal soft lithography. This lift-off technique utilizes a patterned polymer stamp to remove porous-Si layers from the Si substrate. The nanostructure and optical properties of the porous-Si photonic crystal are conserved throughout the micropatterning process. In addition, reversible chemical sensing via optical reflectivity is demonstrated with a porous-Si Bragg mirror.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Photonic and Optical Devices · Nanofabrication and Lithography Techniques · Silicon Nanostructures and Photoluminescence
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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