journal article·1993-05

DNA technology in chip construction

Ernesto Di Mauro, Cornelis P. Hollenberg

Advanced Materials· Volume 5· Issue 5
Publisher page

Abstract

The use of photolithography of produce 3 nm features sounds like a pipe dream. But is it? The circuit size achievable with X‐ray lithography cannot be pushed below 0.25 μm due to limiting lens technology. Now it has been shown that the genetic material DNA can be used to form micro‐photomasks with features 100 times smaller than those on current silicon chips. The construction of nucleic and networks, their conversion into electron‐conducting networks, and their use in photolithography are described.
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Research context

OpenAlex topics: DNA and Nucleic Acid Chemistry · Advanced biosensing and bioanalysis techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (6)

Show source-provided references
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6. 10.1007/978-3-642-66809-8_510.1007/978-3-642-66809-8_5 ↗