journal article·2008-09-17

Photoresist‐Free Lithographic Patterning of Solution‐Processed Nanostructured Metal Thin Films

Hyunkwon Shin, Hyunjun Kim, Hyeongjae Lee, Hyeonggeun Yoo, Jinsoo Kim, Hyoungsub Kim, Myeongkyu Lee

Advanced Materials· Volume 20· Issue 18
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Abstract

Nanostructured Ag thin films solution-deposited on glass and plastic substrates are patterned by direct exposure to a pulsed Nd:YAG laser without using a photoresist layer. Sharp-edged patterns with a feature size scaled down to ca. 2 µm are obtainable.
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Research context

OpenAlex topics: Nanofabrication and Lithography Techniques · Nanomaterials and Printing Technologies · Fluid Dynamics and Thin Films

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