journal article·2003-09-03

Micropatterning of Metal Nanoparticles via UV Photolithography

S. Horiuchi, T. Fujita, T. Hayakawa, Y. Nakao

Advanced Materials· Volume 15· Issue 17
Publisher page

Abstract

The patterning metal nanoparticles by a combination of conventional UV irradiation on PMMA and the reduction of PdII bis(acetylacetonato) is reported. PMMA does not reduce the metal complex as much as other polymers do, but exposure to UV enhances the reducing power against the metal complex and enables Pd particles to be patterned on PMMA films when irradiated through a photomask (see Figure).
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Nanofabrication and Lithography Techniques · Block Copolymer Self-Assembly · Fluid Dynamics and Thin Films

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (20)

Show source-provided references
1. Nanoparticles and Nanostructured Films(Ed: J. H. Fendler) Wiley‐VCH Weinheim1998.
2. Metal Nanoparticles(Eds: D. L. Feldheim C. A. Foss Jr.) Marcel Dekker New York2002.
3. 10.1126/science.276.5317.140110.1126/science.276.5317.1401 ↗
4. 10.1002/1521-4095(200108)13:15<1174::AID-ADMA1174>3.0.CO;2-Q10.1002/1521-4095(200108)13:15<1174::AID-ADMA1174>3.0.CO;2-Q ↗
5. 10.1021/la990070n10.1021/la990070n ↗
6. 10.1002/adma.20029001110.1002/adma.200290011 ↗
7. 10.1002/1521-4095(200112)13:23<1783::AID-ADMA1783>3.0.CO;2-X10.1002/1521-4095(200112)13:23<1783::AID-ADMA1783>3.0.CO;2-X ↗
8. 10.1002/1521-4095(200103)13:6<421::AID-ADMA421>3.0.CO;2-#10.1002/1521-4095(200103)13:6<421::AID-ADMA421>3.0.CO;2-# ↗
9. 10.1126/science.290.5499.212610.1126/science.290.5499.2126 ↗
10. 10.1002/1521-4095(20020116)14:2<165::AID-ADMA165>3.0.CO;2-310.1002/1521-4095(20020116)14:2<165::AID-ADMA165>3.0.CO;2-3 ↗
11. 10.1002/1521-4095(20020816)14:16<1140::AID-ADMA1140>3.0.CO;2-510.1002/1521-4095(20020816)14:16<1140::AID-ADMA1140>3.0.CO;2-5 ↗
12. 10.1002/1521-4095(20020318)14:6<418::AID-ADMA418>3.0.CO;2-K10.1002/1521-4095(20020318)14:6<418::AID-ADMA418>3.0.CO;2-K ↗
13. 10.1002/1521-4095(200010)12:20<1507::AID-ADMA1507>3.0.CO;2-910.1002/1521-4095(200010)12:20<1507::AID-ADMA1507>3.0.CO;2-9 ↗
14. 10.1021/la020745d10.1021/la020745d ↗
15. 10.1246/cl.2000.76610.1246/cl.2000.766 ↗
16. 10.1116/1.56852710.1116/1.568527 ↗
17. 10.1147/rd.212.012110.1147/rd.212.0121 ↗
18. Polymer Microscopy(Eds: L. C. Sawyer D. T. Grubb) Chapman & Hall London1996 p. 28.
19. Near‐Field Nano‐Optic from Basic Principle to Nano‐fabrication and Nano‐Photonics(Eds: M. Ohtsu H. Horii) Kluwer Academic Dordrecht2000.
20. 10.1021/la025524m10.1021/la025524m ↗