journal article·2006-06-19

Infiltration and Inversion of Holographically Defined Polymer Photonic Crystal Templates by Atomic Layer Deposition

J. S. King, E. Graugnard, O. M. Roche, D. N. Sharp, J. Scrimgeour, R. G. Denning, A. J. Turberfield, C. J. Summers

Advanced Materials· Volume 18· Issue 12
Publisher page

Abstract

Practical methods of microfabrication are vital for the development of photonic-crystal-based signal processing. However, extension of the optical methods that dominate integrated circuit fabrication to three dimensions is challenging. This communication reports an essential step for creation of devices operating within a full photonic band gap: atomic layer deposition is used to create the high-index TiO2 replicas of holographically defined photonic crystals shown in the figure.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Photonic Crystals and Applications · Photonic and Optical Devices · Nonlinear Optical Materials Studies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (38)

Show source-provided references
1. 10.1038/nmat109710.1038/nmat1097 ↗
2. 10.1002/adma.20050228610.1002/adma.200502286 ↗
3. 10.1038/3500352310.1038/35003523 ↗
4. 10.1038/1798910.1038/17989 ↗
5. 10.1063/1.12336710.1063/1.123367 ↗
6. 10.1038/nmat115510.1038/nmat1155 ↗
7. 10.1038/3508913010.1038/35089130 ↗
8. 10.1364/OL.30.00088110.1364/OL.30.000881 ↗
9. 10.1103/PhysRevLett.67.338010.1103/PhysRevLett.67.3380 ↗
10. 10.1209/0295-5075/16/6/00910.1209/0295-5075/16/6/009 ↗
11. 10.1103/PhysRevB.65.16512310.1103/PhysRevB.65.165123 ↗
12. 10.1103/PhysRevB.68.20510210.1103/PhysRevB.68.205102 ↗
13. 10.1038/3510452910.1038/35104529 ↗
14. 10.1038/3501302410.1038/35013024 ↗
15. 10.1039/b208805n10.1039/b208805n ↗
16. 10.1002/adma.20030404310.1002/adma.200304043 ↗
17. 10.1126/science.281.5378.80210.1126/science.281.5378.802 ↗
18. 10.1021/cm011158110.1021/cm0111581 ↗
19. 10.1002/(SICI)1521-4095(199910)11:15<1261::AID-ADMA1261>3.0.CO;2-A10.1002/(SICI)1521-4095(199910)11:15<1261::AID-ADMA1261>3.0.CO;2-A ↗
20. M. Ritala M. Leskelä inHandbook of Thin Film Materials Vol. I (Ed: H. S. Nalwa) Harcourt Academic London UK2002 Ch. 2.
21. 10.1016/S0169-4332(96)01004-510.1016/S0169-4332(96)01004-5 ↗
22. 10.1002/adma.20040064810.1002/adma.200400648 ↗
23. 10.1016/j.apsusc.2004.10.11010.1016/j.apsusc.2004.10.110 ↗
24. 10.1021/nl034362r10.1021/nl034362r ↗
25. 10.1063/1.160924010.1063/1.1609240 ↗
26. 10.1063/1.190095710.1063/1.1900957 ↗
27. 10.1002/cvde.20039000510.1002/cvde.200390005 ↗
28. 10.1016/0022-0248(94)00874-410.1016/0022-0248(94)00874-4 ↗
29. 10.1016/0040-6090(93)90172-L10.1016/0040-6090(93)90172-L ↗
30. 10.1021/cm040008y10.1021/cm040008y ↗
31. D. Heineman M. S. Thesis Georgia Institute of Technology2004(http://etd.gatech.edu/theses/available/etd‐05142004‐143254/).
32. E. R. Dedman D. N. Sharp A. J. Turberfield C. F. Blanford R. G. Denning unpublished.
33. 10.1103/PhysRevLett.83.30010.1103/PhysRevLett.83.300 ↗
34. 10.1364/JOSAA.21.00170310.1364/JOSAA.21.001703 ↗
35. 10.1103/PhysRevLett.83.273010.1103/PhysRevLett.83.2730 ↗
36. 10.1016/j.ssc.2005.04.03710.1016/j.ssc.2005.04.037 ↗
37. Roadmap on Photonic Crystals(Eds: S. Noda T. Baba) Springer Berlin Germany2003.
38. 10.1364/OE.8.00017310.1364/OE.8.000173 ↗