A New Type of Low-ϰ Dielectric Films Based on Polysilsesquioxanes
Source abstract
Abstract
A low-ϰ organic–inorganic hybrid material (see Figure) based on functionalized silsesquioxanes is demonstrated. The preparation is based on platinum-catalyzed hydrosilylation or hydrolytic condensation of functionalized silsesquioxanes, and by controlling the parameters for spin coating, by which the hybrid copolymer is fabricated, coherent films with a thickness ranging from 22–28 μm can be obtained.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Silicone and Siloxane Chemistry · Synthesis and properties of polymers · Copper Interconnects and Reliability
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