journal article·1998-10

Microstructuring of Molecularly Thin Polymer Layers by Photolithography

Oswald Prucker, Martin Schimmel, Günter Tovar, Wolfgang Knoll, Jürgen Rühe

Advanced Materials· Volume 10· Issue 14
Publisher page

Abstract

Laterally structured ultrathin polymer films attached to solid surfaces can be obtained using photolithographic techniques developed for electronic device fabrication. The Figure shows a surface plasmon (SP) microscopy image of a structured polystyrene (PS) film of 21.5 nm thickness prepared by photopolymerization. The authors report a strong adhesion of the polymer films to the substrate due to covalent linking.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Nanofabrication and Lithography Techniques

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