Room-Temperature Imprint Lithography
Source abstract
Abstract
Room-temperature imprint lithography showing unique features that are impossible to achieve with conventional high-temperature processes is unveiled here. Large-area nanopatterning, enabled by step-and-repeat and multiple imprinting (see Figure), leads to more versatile and practical nanoscale patterning.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Nanofabrication and Lithography Techniques · Microfluidic and Capillary Electrophoresis Applications · Metal and Thin Film Mechanics
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References
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