Rigiflex Lithography for Nanostructure Transfer
Source abstract
Abstract
Rigiflex lithography combines the mold rigidity of imprint lithography, which permits fine patterning, with the mold flexibility of soft lithography, allowing intimate contact of the mold with the surface substrate over a large area. A UV-curable mold based on poly(urethane acrylate) is prepared as a film on a flexible poly(ethylene terephthalate) support, allowing nanopatterns to be prepared by a bilayer-transfer technique (see Figure).
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Nanofabrication and Lithography Techniques · Advancements in Photolithography Techniques · Microfluidic and Capillary Electrophoresis Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (22)
Show source-provided references
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