3D Self‐Assembled Microelectronic Devices: Concepts, Materials, Applications
Source abstract
Abstract
Abstract Modern microelectronic systems and their components are essentially 3D devices that have become smaller and lighter in order to improve performance and reduce costs. To maintain this trend, novel materials and technologies are required that provide more structural freedom in 3D over conventional microelectronics, as well as easier parallel fabrication routes while maintaining compatability with existing manufacturing methods. Self‐assembly of initially planar membranes into complex 3D architectures offers a wealth of opportunities to accommodate thin‐film microelectronic functionalities in devices and systems possessing improved performance and higher integration density. Existing work in this field, with a focus on components constructed from 3D self‐assembly, is reviewed, and an outlook on their application potential in tomorrow's microelectronics world is provided.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Advanced Materials and Mechanics · Modular Robots and Swarm Intelligence
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Institute for Integrative Nanosciences Leibniz IFW Dresden Dresden 01069 Germany
Material Systems for Nanoelectronics Chemnitz University of Technology Chemnitz 09107 Germany
Research Center for Materials Architectures and Integration of Nanomembranes (MAIN) Rosenbergstraße 6 TU Chemnitz Chemnitz 09126 Germany
School of Science TU Dresden Dresden 01062 Germany
Funding
Deutsche Forschungsgemeinschaft
References (100+)
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