Nanometer Resolution Self‐Powered Static and Dynamic Motion Sensor Based on Micro‐Grated Triboelectrification

A one-dimensional displacement and speed sensing technology that consists of a pair of micro-grating structures and utilizes the coupling between the triboelectric effect and electrostatic induction is demonstrated. Its distinct advantages, including being self-powered, high resolution, large dynamic range, and long detecting distance, show extensive potential applications in automation, manufacturing, process control, and portable devices. As a service to our authors and readers, this journal provides supporting information supplied by the authors. Such materials are peer reviewed and may be re-organized for online delivery, but are not copy-edited or typeset. Technical support issues arising from supporting information (other than missing files) should be addressed to the authors. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.