Hole-Mediated Anisotropic Chemical Etching of Crystalline Silicon in HF Solutions: From Pyramidal to Porous Structures

Jiang Wang; Haoxin Fu; Chenliang Huo; Haichuan Zhao; Kui-Qing Peng

doi:10.1149/2.0101904jss

journal article·2019

Hole-Mediated Anisotropic Chemical Etching of Crystalline Silicon in HF Solutions: From Pyramidal to Porous Structures

Jiang Wang, Haoxin Fu, Chenliang Huo, Haichuan Zhao, Kui-Qing Peng

ECS Journal of Solid State Science and Technology· Volume 8· Issue 4

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OpenAlex topics: Silicon Nanostructures and Photoluminescence · Nanowire Synthesis and Applications · Semiconductor materials and devices

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