Fast Atom Beam Activated Wafer Bonds between n-Si and n-GaAs with Low Resistance
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Abstract
S.Q178-Q181
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Semiconductor materials and devices · Semiconductor materials and interfaces · Integrated Circuits and Semiconductor Failure Analysis
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References (28)
Show source-provided references
1. 10.1063/1.34628410.1063/1.346284 ↗
2. 10.1016/0960-8974(91)90025-810.1016/0960-8974(91)90025-8 ↗
3. 10.1063/1.155896310.1063/1.1558963 ↗
4. 10.1149/1.208659510.1149/1.2086595 ↗
5. 10.1016/S0169-4332(97)80187-010.1016/S0169-4332(97)80187-0 ↗
6. 10.1109/2944.99140710.1109/2944.991407 ↗
7. 10.1049/el:2000050710.1049/el:20000507 ↗
8. 10.1038/srep0034910.1038/srep00349 ↗
9. Derendorf K. Essig S. Oliva E. Klinger V. Roesener T. Benick J. Hermle M. Schachtner M. Siefer G. Jäger W. Dimroth F. , IEEE Journal of Photovoltaics, accepted, (2013).
10. 10.1063/1.12158610.1063/1.121586 ↗
11. 10.1116/1.141411510.1116/1.1414115 ↗
12. 10.1149/1.356884210.1149/1.3568842 ↗
13. 10.1063/1.480790510.1063/1.4807905 ↗
14. van der Pauw · Philips Technical Review · 1959 · 20 · 220
15. 10.1016/j.tsf.2010.08.14410.1016/j.tsf.2010.08.144 ↗
16. 10.1143/JJAP.38.158910.1143/JJAP.38.1589 ↗
17. 10.1149/1.327295710.1149/1.3272957 ↗
18. 10.1016/j.nimb.2010.02.09110.1016/j.nimb.2010.02.091 ↗
19. 10.1063/1.34346910.1063/1.343469 ↗
20. 10.1063/1.35217210.1063/1.352172 ↗
21. 10.1063/1.34263210.1063/1.342632 ↗
22. 10.1063/1.34903910.1063/1.349039 ↗
23. 10.1063/1.11639110.1063/1.116391 ↗
24. 10.1063/1.36422910.1063/1.364229 ↗
25. 10.1063/1.10885510.1063/1.108855 ↗
26. Sze S. M. , Physics of Semiconductor Devices, p. 868, John Wiley & Sons, New York, New York, USA (1981).
27. 10.1016/0168-583X(85)90585-310.1016/0168-583X(85)90585-3 ↗
28. Stangl R. Froitzheim A. Kriegel M. Brammer T. Kriste S. Elstner L. Stiebig H. Schmidt H. Fuchs W. , in Proceedings of the 19th European Photovoltaic Solar Energy Confernce, p. 1497, Paris, France, 2004.