Current Stage of the Investigation of the Composition of Oxygen Precipitates in Czochralski Silicon Wafers
Source abstract
Abstract
In this work, we look on the current stage of the investigation of the composition of oxygen precipitates obtained with the help of different techniques. Moreover, we present our recent and new investigation of the composition of oxygen precipitates carried out by means of energy dispersive X-ray spectroscopy, electron energy loss spectroscopy, and Fourier transform infrared spectroscopy. The FTIR spectra measured at liquid helium temperature are compared with the spectra simulated on the basis of experimental results obtained by scanning transmission electron microscopy. According to the results obtained by all methods the precipitated phase of plate-like as well as octahedral precipitates is close to SiO2.
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Research context
OpenAlex topics: Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence · Thin-Film Transistor Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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