Impact of Amino-Alcohol Organic Molecule on Various Silicon Oxide Bondings
Source abstract
Abstract
Recently a new surface preparation method using an organic molecule was introduced for silicon direct wafer bonding F. Fournel, L. Continni, C. Morales, J. Da Fonseca, H. Moriceau, F. Rieutord, A. Barthelemy, and I. Radu, J. Appl. Phys. , 111 , 104907 (2012). Adding a very small amount of amino-alcohol molecule at the bonding interface drastically increased the bonding energy after low post bonding annealing temperature. In this study, additional developments using the same molecule type (DEAE: N-N-diethylaminoethanol) are presented.
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Research context
OpenAlex topics: 3D IC and TSV technologies · Nanofabrication and Lithography Techniques · Advanced Surface Polishing Techniques
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References (11)
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