journal article·2020-01-05Open access

Erratum: Galvanic corrosion inhibitors for Cu/Ru couple during chemical mechanical polishing of Ru [ ECS J. Solid-State Sci. Technol., 7 , P62 (2017)]

Jie Cheng, Tongqing Wang, Xinchun Lu

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Research context

OpenAlex topics: Metallurgy and Material Science

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