Multilayered Composite Membranes Based on Layer‐by‐Layer Stacked Graphene Films for Ultraviolet Pellicle Applications (Adv. Funct. Mater. 4/2026)
Source abstract
Abstract
Stacked Graphene Films The diagram illustrates the use of a pellicle made from a multilayer composite film, composed of layer-by-layer stacked graphene, for extreme ultraviolet (EUV) lithography. This graphene-based pellicle offers excellent optical transparency, mechanical strength, and thermal stability, ensuring superior protection for the photomask during EUV exposure and minimizing degradation or contamination. More information can be found in the Research Article by Yun Sung Woo, Byung Hee Hong, and co-workers (10.1002/adfm.202518685).
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Graphene research and applications · Advancements in Photolithography Techniques · Transition Metal Oxide Nanomaterials
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Affiliations
Department of Chemistry Seoul National University Seoul 08826 Republic of Korea
Graphene Square Inc Suwon 16629 Republic of Korea
Advanced Analysis Centre Korea Institute of Science and Technology Seoul 02792 Republic of Korea
Graduate Institute of Ferrous and Eco Materials Technology POSTECH Pohang 37673 Republic of Korea
Department of Materials Science and Engineering Dankook University Cheonan 31116 Republic of Korea
References
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